| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for producing a base substance where a base substance is cut/divided using laser light, by which, even if dust or the like is stuck to the surface of a base substance, the base substance can be cut/divided with high precision. <P>SOLUTION: The method for producing a substrate P as a base substance is provided with: a stage where a film 48 is formed on the substrate P; a stage where the film 48 is irradiated with laser light 45, and the film 48 is transpired, so as to form a film removed part 49; a stage where the laser light 45 is further emitted so as to be connected with the film removed part 49, thus a material denatured part 47 is formed at the substrate P; a film residue detection stage where the film residue 48b in the film removed part 49 is detected; and a stage where a stress F is applied to the base substance P, so as to form divided pieces Q. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
