| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal pulling apparatus with which working efficiency can be enhanced without interruption of the work in the process of filling material silicon to a crucible, even if the wire suspending the valve of a hopper for the storage of a material silicon is cut off while preventing dropping off of each member, accompanying the cut, to the crucible. SOLUTION: In a single crystal pulling apparatus equipped with a filling means to fill a material silicon L to a crucible, the filling means comprises a hopper main body 14 which stores the material silicon L, also has an opening port formed at the bottom and engaged inside a chamber; a valve 17 which is formed freely openable and closable to the opening port and discharges the material silicon L inside the hopper main body 14 to the crucible situated below by opening the opening port; a first wire 19 suspending the valve 17 upwardly and downwardly movable; and a second wire 20 which is formed to be longer than the first wire 19 by a specific length and has each terminal connected to the position where a respective terminal of the first wire 19 is connected. COPYRIGHT: (C)2008,JPO&INPIT
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