Photomultiplier Tube, Image Sensor, And An Inspection System Using A PMT Or Image Sensor

摘要

A system for inspecting a sample including a detector, either a photomultiplier tube or an electron-bombarded image sensor, that is positioned to receive light from the sample. The detector includes a semiconductor photocathode and a photodiode. Notably, the photodiode includes a p-doped semiconductor layer, an n-doped semiconductor layer formed on a first surface of the p-doped semiconductor layer to form a diode, and a pure boron layer formed on a second surface of the p-doped semiconductor layer. The semiconductor photocathode includes silicon, and further includes a pure boron coating on at least one surface.

主权项

1. A system for inspecting a sample, the system comprising:
a laser system for generating light; first components for directing the light to the sample; one or more detectors; and second components for directing light from the sample to the one or more detectors, wherein said one or more detectors include a photomultiplier tube, the photomultiplier tube comprising: a semiconductor photocathode; and a photodiode including:
a p-doped semiconductor layer;a n-doped semiconductor layer formed on a first surface of the p-doped semiconductor layer to form a diode; anda pure boron layer formed on a second surface of the p-doped semiconductor layer, wherein the semiconductor photocathode comprises silicon, and wherein the semiconductor photocathode further comprises a pure boron coating on at least one surface.