| 摘要 |
PROBLEM TO BE SOLVED: To prevent iron and particles from remaining on a substrate after processing in a substrate processing apparatus in which a process liquid as an organic solvent is supplied from a container formed by stainless steel.SOLUTION: A substrate processing apparatus 1 comprises: a container 92 which is connected to a connection part 126 and formed by stainless steel, for storing IPA 91 as a process liquid; a processing part 11 to which the IPA 91 is introduced via a supply route 121 in which processing in the processing part 11 includes a drying treatment of a substrate 9 by the IPA 91; a first particle removal filter 122, a metal removal filter 123 and a second particle removal filter 124 which are provided on the supply route 121 in this order. This prevents iron and particles from remaining on the substrate 9 after the processing.SELECTED DRAWING: Figure 1 |
