Method for attachment of an electrode into an inductively-coupled plasma

摘要

An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.

主权项

1. A method for removable attachment of an electrode to a plasma source, comprising:
providing a plasma source having a reaction chamber, said reaction chamber having a multilayer metal interface layer on a portion of the reaction chamber to which a source electrode or a component to which the source electrode is attached is mounted; and removably attaching the source electrode to the plasma source, the interface layer providing a thermally conductive, vacuum sealable joint between the reaction chamber and the source electrode or a component to which the source electrode is attached.