发明名称 Compound semiconductor multilayer structure, hall device, and hall device manufacturing method
摘要 Hall device is provided by enabling stable provision of a quantum well compound semiconductor stacked structure. It has first and second compound semiconductor layers composed of Sb and at least two of five elements of Al, Ga, In, As and P, and an active layer composed of InxGa1-x,AsySb1-y (0.8<=x<=1.0, 0.8 <y<=1.0), which are stacked. Compared with the active layer, the first and second compound semiconductor layers each have a wider band gap, and a resistance value five times or more greater. The lattice constant differences between the active layer and the first and second compound semiconductor layers are each designed in a range of 0.0-1.2%, and the thickness of the active layer is designed in a range of 30-100 nm.
申请公布号 US2005042814(A1) 申请公布日期 2005.02.24
申请号 US20040501349 申请日期 2004.07.15
申请人 WATANABE TAKAYUKI;SHIBATA YOSHIHIKO;UJIHARA TSUYOSHI;YOSHIDA TAKASHI;OYAMA AKIHIKO 发明人 WATANABE TAKAYUKI;SHIBATA YOSHIHIKO;UJIHARA TSUYOSHI;YOSHIDA TAKASHI;OYAMA AKIHIKO
分类号 G01R33/07;H01L29/201;H01L29/205;H01L43/06;H01L43/14;(IPC1-7):H01L21/823 主分类号 G01R33/07
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