| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing trichlorosilane, by which when a reaction product gas formed by a conversion reaction and containing trichlorosilane is cooled, the decomposition of trichlorosilane and the formation of high boiling point substances caused by a reaction of the trichlorosilane with hydrogen chloride can be effectively suppressed, therefore, a continuous reaction is not obstructed by blocking or the like in the system and the load of removal work of the high boiling substances can be reduced, and resultingly, the recovery rate of trichlorosilane is enhanced.SOLUTION: The method for producing trichlorosilane includes a conversion step of forming a reaction product gas containing trichlorosilane by subjecting a raw material gas containing tetrachlorosilane and hydrogen, and a cooling step of recovering a condensate containing trichlorosilane by cooling the reaction product gas. In the cooling step, a coolant is sprayed to the reaction product gas to cool the gas, the condensate is used circularly as the coolant, and the concentration of the high boiling point substances contained in the coolant is set to be 8-10 mass%. |
