| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a Kelvin probe instrument, across which a large voltage drop will not generate, even if a large current is made to flow. <P>SOLUTION: A current supply probe 20 and a voltage monitoring probe 30 are arranged in parallel with a socket 10, made of insulating material, contacting points 24a, 34a of the plungers 24, 34 of the two probes 20, 30 are brought together into elastic contact with one terminal 52 of an electronic component 50 to be inspected; and by increasing the external shape of the tube 22 of the supplying probe 20, its cross-sectional area perpendicular to the axial direction is set larger than the cross-sectional area of the tube 32 of the monitoring probe 30 perpendicular to its axial direction. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
