| 摘要 |
PROBLEM TO BE SOLVED: To provide a cryo pump capable of preventing a drop in exhaust capability and cooling capability during operation of the cryo pump when a large amount of water is exhausted, thereby enabling shortening of regeneration time and long-term use of the cryo pump. SOLUTION: The cryo pump includes a cryo pump container 14, a refrigerator 15, a radiation shield 18 provided within the cryo pump container and connected to a cooling stage of the refrigerator, and a louver 20 arranged at an opening portion of the radiation shield 18. A water storage section 32 for exhausting the water to the exterior of the cryo pump container 14 is arranged outside of the radiation shield 18. COPYRIGHT: (C)2008,JPO&INPIT
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