发明名称 Systems And Methods To Increase Uniaxial Compressive Stress In Tri-Gate Transistors
摘要 A transistor structure that increases uniaxial compressive stress on the channel region of a tri-gate transistor comprises at least two semiconductor bodies formed on a substrate, each semiconductor body having a pair of laterally opposite sidewalls and a top surface, a common source region formed on one end of the semiconductor bodies, wherein the common source region is coupled to all of the at least two semiconductor bodies, a common drain region formed on another end of the semiconductor bodies, wherein the common drain region is coupled to all of the at least two semiconductor bodies, and a common gate electrode formed over the at least two semiconductor bodies, wherein the common gate electrode provides a gate electrode for each of the at least two semiconductor bodies and wherein the common gate electrode has a pair of laterally opposite sidewalls that are substantially perpendicular to the sidewalls of the semiconductor bodies.
申请公布号 US2009152589(A1) 申请公布日期 2009.06.18
申请号 US20070958275 申请日期 2007.12.17
申请人 RAKSHIT TITASH;GILES MARTIN D;GHANI TAHIR;MURTHY ANAND;CEA STEPHEN M 发明人 RAKSHIT TITASH;GILES MARTIN D.;GHANI TAHIR;MURTHY ANAND;CEA STEPHEN M.
分类号 H01L29/778;H01L21/8234 主分类号 H01L29/778
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