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发明名称
SPUTTERING TARGET, TRANSPARENT CONDUCTIVE FILM, AND THEIR MANUFACTURING METHOD
摘要
申请公布号
KR100941241(B1)
申请公布日期
2010.02.10
申请号
KR20097006278
申请日期
2002.07.08
申请人
发明人
分类号
C23C14/34;C23C14/08;H01B5/14;H01L31/18
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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