发明名称 |
VAPOR BASED COMBINATORIAL PROCESSING |
摘要 |
A combinatorial processing chamber and method are provided. In the method a fluid volume flows over a surface of a substrate with differing portions of the fluid volume having different constituent components to concurrently expose segregated regions of the substrate to a mixture of the constituent components that differ from constituent components to which adjacent regions are exposed. Differently processed segregated regions are generated through the multiple flowings. |
申请公布号 |
EP2186117(A4) |
申请公布日期 |
2016.07.06 |
申请号 |
EP20080829663 |
申请日期 |
2008.09.05 |
申请人 |
INTERMOLECULAR, INC. |
发明人 |
CHIANG, TONY, P.;SHANKER, SUNIL;LANG, CHI-I |
分类号 |
H01L21/205;C23C16/455 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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