| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for reducing a contact resistance between a contact probe and an electrode pad.SOLUTION: A contact probe 11 contacts an electrode pad of an inspection target 7. The contact probe 11 includes: a contact portion 15 having a contact surface 30 in contact with the electrode pad and exhibiting flexibility; and a pressurization portion 13 pressurizing the contact portion 15 to press the contact surface 30 on the electrode pad. |
