| 摘要 |
PROBLEM TO BE SOLVED: To remove foreign objects adhering to a holding surface of a suction holding part.SOLUTION: A foreign object removal device according to one embodiment includes a jet part and a suction part. The jet part jets a fluid to a holding surface of a suction holding part which suctions and holds a substrate. The suction part is disposed adjacent to the jet part and suctions the fluid.SELECTED DRAWING: Figure 5 |
