LOAD PORT DEVICE EQUIPPED WITH DUST PROTECTION FUNCTION, AND MINI ENVIRONMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To stabilize an air flow flowing to the outside from a chamber within a load port device through a gap formed between a door which approximately closes an opening formed to insert and to take out a wafer between pods and the opening in the load port device. SOLUTION: The slit width of the opening of the chamber side of the slit in a predetermined area is made wider than the slit width of the other area in the length (depth) direction of the slit formed of the opening inner circumferential surface of the chamber wall and the outer circumferential surface of the door forming and defining the chamber of the load port device. COPYRIGHT: (C)2008,JPO&INPIT