| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light irradiation device capable of reducing the time required for attaching and detaching a light-shielding mask. <P>SOLUTION: The circumference part 20a of a light-shielding mask 20, the part close to the rim from a suction groove 21 is pressed to a mask-holding member 12 by a movable sealing 44 as a pressing part provided in a work stage body 40. <P>COPYRIGHT: (C)2009,JPO&INPIT |
