CANTILEVER-TYPE SENSOR, AS WELL AS A SUBSTANCE SENSING SYSTEM AND A SUBSTANCE SENSING METHOD THAT USE THE SENSOR

摘要

The cantilever-type sensor detects a substance to be measured as it is contained in a liquid. The sensor includes a cantilever that is fixed at least at an end to a support section and which has a channel formed inside, a piezoelectric device that is composed of a piezoelectric element and electrode sections formed on opposite sides of the piezoelectric element and which is positioned on at least one side of the cantilever, a drive section that applies a voltage to the electrode sections of the piezoelectric device so as to vibrate the cantilever, a detecting section that detects vibration of the cantilever from expansion or contraction of the piezoelectric device and a liquid supply unit for flowing the liquid through the channel in the cantilever. The cantilever-type sensor features high precision in measurement and is compact and less costly.