ION BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To achieve a mechanism for accurately adjusting an emission direction of ion from an emitter tip (21) to a direction of a sample by making compact an ion irradiation system, and shortening ion optical length.SOLUTION: A charged particle beam microscope is configured of: a gas field ionization ion source (1); a focusing lens (5) for accelerating/focusing ions emitted from the ion source; a movable first aperture (6) for limiting an ion beam passing through the focusing lens; a first deflector (35) for scanning or aligning the ion beam passing through the first aperture; a second deflector (7) for deflecting the ion beam passing through the first aperture; a second aperture (36) for limiting the ion beam passing through the first aperture; an objective lens (8) for focusing the ion beam passing through the first aperture on a sample; and means for measuring a signal amount which is roughly proportional to the ion beam currents passing through the second aperture.