| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a target generating/supplying device for an extreme ultraviolet light source suitable for continuously supplying targets for an extreme ultraviolet light source. <P>SOLUTION: High voltage is impressed between a slender-tube supply port 121 and an electrode 13 provided in a vacuum chamber 11, and raw liquid with tin and polyvinylpyrrolidone dissolved in ethanol is made injected into the vacuum chamber 11 from the supply port 121. The raw liquid flies toward the electrode 13. During the time, ethanol evaporates to have thread-like targets 16 for an extreme ultraviolet light source formed with tin carried by thread-like polyvinylpyrrolidone. Plasma of tin is generated by irradiating laser beams 17 from a light source 15 while the thread-shaped targets 16 for the extreme ultraviolet light source are flying, and extreme ultraviolet light 18 is generated by the plasma. By this device, the extreme ultraviolet light can be continuously generated while continuously generating the thread-shaped targets 16 for the extreme ultraviolet light source, and further, generated debris is attracted to an electrode 13 and collected. <P>COPYRIGHT: (C)2007,JPO&INPIT |
