BENZOXAZOLE PRECURSOR, RESIN COMPOSITION AND COATING VARNISH, RESIN FILM, AND SEMICONDUCTOR DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor device with excellent reliability by using a coating varnish which has good preservability and can be used for producing a resin film lowered in permittivity. SOLUTION: This benzoxazole precursor comprises an aromatic compound having an aminohydroxyphenyl group, a carboxy group and a group comprising a diamondoid structure. The benzoxazole precursor has a structure expressed by general formula (1), wherein X is a group comprising one or more diamondoid structure(s); Ar1and Ar2each represents an aromatic group; m1and m2each denotes an integer of 0-4; m3denotes 0 or 1; Y is hydrogen or a group comprising a diamondoid structure, provided that when m3is 0, Y is a group comprising the diamondoid structure. COPYRIGHT: (C)2008,JPO&INPIT