ELECTROSTATIC ACTUATOR, DROPLET DISCHARGE HEAD, DROPLET DISCHARGE DEVICE, AND MANUFACTURING METHOD FOR ELECTROSTATIC ACTUATOR, DROPLET DISCHARGE HEAD AND DROPLET DISCHARGE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic actuator capable of attaining joint strength even when high-k material is used as an insulation film for the actuator. SOLUTION: This electrostatic actuator in which a silicon substrate 2 and a glass substrate 3 are jointed at an interval of a gap G, an oscillation plate 12 is provided on the silicon substrate 2 side positioned facing the gap G, and a facing electrode 17 is provided on the glass substrate 3 side, and which deforms the oscillation plate 12 by an electrostatic force by applying a driving voltage between the oscillation plate 12 and the facing electrode 17. A high dielectric constant film 16a having insulation which has a higher dielectric constant than SiO2is formed by film formation on a surface of the oscillation plate 12 positioned facing the gap G, and a thermal oxidation film 16b having insulation and made of SiO2is formed at the joint portion on the silicon substrate 2 side in which the silicon substrate 2 and the glass substrate 3 are brought into contact by a predetermined depth from the surface of the silicon substrate 2 by means of thermal oxidation processing. COPYRIGHT: (C)2008,JPO&INPIT