发明名称 LASER CRYSTALLIZATION SYSTEM AND CRYSTALLIZATION ENERGY CONTROL METHOD THEREFOR
摘要 A laser crystallization system and a crystallization energy control method therefor. The laser crystallization system comprises: a Mura monitoring device (10), used for monitoring the real-time Mura condition in the crystallization process; a host set (11), connected to the Mura monitoring device and used for determining the real-time level of the real-time Mura condition obtained through monitoring of the Mura monitoring device and generating a crystallization energy control instruction according to the real-time level; and a crystallization device (12), connected to the host set and used for executing the crystallization energy control instruction generated by the host set to control output crystallization energy. On-line monitoring is performed on the Mura condition by the Mura monitoring device in real time, and the crystallization energy output by the crystallization device is controlled according to the real-time Mura condition, so that the Mura condition of products can be effectively monitored, and the corresponding crystallization energy is further controlled. Compared with the manual mode, the working efficiency is greatly improved, the accuracy and on-line control can be ensured, and the yield rate of the products is ensured.
申请公布号 WO2016106788(A1) 申请公布日期 2016.07.07
申请号 WO2015CN70185 申请日期 2015.01.06
申请人 SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 WANG, ZHIGANG;LI, ZIJIAN;TANG, LIJUAN;LI, YONG
分类号 H01L21/268 主分类号 H01L21/268
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