| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent positional deviation between bonded substrates, at inverting of the bonded substrates. <P>SOLUTION: In a device for inverting two sheets of substrates 1A, 1B bonded to each other via a sealing material 1a, a planar holding portion 21 is constructed so as to be ascendable and descendable, while sucking a face of the bonded two sheets of the substrates 1A, 1B; and a pressing portion 22 pressurizes the upper substrate 1A of the two sheets of the substrates 1A, 1B sucked and held with the holding portion 21 and holds them in between; and consequently bend deformation of the two sheets of the substrates 1A, 1B in inversion is suppressed and the high-quality bonded substrates are manufactured. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
