发明名称 COOLING STRUCTURE FOR ELECTROMAGNETIC COIL, AND ELECTROMAGNETIC ACTUATOR
摘要 A cooling structure for a first electromagnetic coil 30 includes the first electromagnetic coil 30 having a space 32 extending in the direction of a predetermined axis Z; a cooling member 20 attached to an end surface 30e, with respect to the direction of the predetermined axis Z, of the first electromagnetic coil 30 and having a flow path for fluid internally formed; and an inlet pipe 22 and an outlet pipe 27 connected, within the space 52, to an inlet 21 and outlet 26, respectively, of the flow path of the cooling member 20 and extending through the space 32 to a region outside the electromagnetic coil 30.
申请公布号 EP3041006(A1) 申请公布日期 2016.07.06
申请号 EP20140843006 申请日期 2014.09.04
申请人 CKD CORPORATION;NIKON CORPORATION 发明人 ITO, Akihiro;KOUKETSU, Masayuki;MORIMOTO, Shigeru;YOSHIMOTO, Hiromitsu;TANAKA, Koji
分类号 H01F7/06;H01L21/027;H02K41/02 主分类号 H01F7/06
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