| 摘要 |
A method for manufacturing a planar waveguide device comprises the following steps: a. forming a first group of film sections (202) on the surface of a waveguide (201), wherein adjacent sections in the first group of film sections (202) are spaced apart from each other; b. exposing the first group of film sections (202) by using a mask (204), so as to solidify a required part (205) of the first group of film sections (202); c. removing an unsolidified edge part (206) in the first group of film sections (202); d. forming a second group of film sections (207) between part of adjacent sections in the first group of film sections (202); and e. exposing the second group of film sections (207) by using a mask (208), so as to solidify the second group of film sections (207). |
