Method for preparing modified silica film and modified silica film prepared from the same

摘要

A method for preparing a modified silica film includes preparing a reactive fluorine-containing polymer solution by dissolving a reactive fluorine-containing polymer including a bonding group bondable to polysilazane in a fluorine-containing solvent, preparing a polysilazane solution by dissolving polysilazane in a solvent for polysilazane, the solvent for polysilazane being immiscible with the fluorine-containing solvent and exhibiting a higher surface tension than the reactive fluorine-containing polymer and the fluorine-containing solvent, preparing a coating liquid by mixing the polysilazane solution with the reactive fluorine-containing polymer solution, forming a coating layer by coating the coating liquid onto a substrate, removing the solvent for polysilazane and the fluorine-containing solvent from the coating layer, and converting the polysilazane into silica while bonding the bonding group of the reactive fluorine-containing polymer to the polysilazane.

主权项

1. A method for preparing a modified silica film, the method comprising:
providing a reactive fluorine-containing polymer solution, the reactive fluorine-containing solution including a fluorine-containing solvent and a reactive fluorine-containing polymer including a bonding group bondable to polysilazane, the reactive fluorine-containing polymer being dissolved in the fluorine-containing solvent; providing a polysilazane solution, the polysilazane solution including a polysilazane and a solvent for polysilazane, the solvent for polysilazane being immiscible with the fluorine-containing solvent and exhibiting a higher surface tension than the reactive fluorine-containing polymer and a higher surface tension than the fluorine-containing solvent, the polysilazane being dissolved in the solvent for polysilazane; preparing a coating liquid by mixing the polysilazane solution with the reactive fluorine-containing polymer solution; forming a coating layer by coating the coating liquid onto a substrate; removing the solvent for polysilazane and the fluorine-containing solvent from the coating layer; and converting the polysilazane into silica while bonding the bonding group of the reactive fluorine-containing polymer to the polysilazane.