MIRROR CONTROLLER AND MIRROR CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To maintain a resonant frequency of a mirror to a desired value. SOLUTION: A mirror controller includes: the rotatably supported mirror 230; electrodes 340a-340d arranged apart from the mirror 230; a drive voltage generation means 401 for generating a drive voltage corresponding to a desired inclined angle of the mirror 230 at each electrode; a mirror resonant frequency detection means 402 for detecting the resonant frequency of the mirror 230; and a bias voltage application means 403 for applying a voltage after the addition to corresponding electrodes 340a-340d by generating a common bias voltage to each electrode 340a-340d and adding a bias voltage and a drive voltage of each voltage. The bias voltage application means 403 control the bias voltage so that the resonant frequency of the mirror 230 is a desired value. COPYRIGHT: (C)2008,JPO&INPIT