THIN FILM TRANSISTOR SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a transistor substrate for a liquid crystal display device preventing damage of a gate electrode when carrying out ion implantation in source/drain are of an active layer, and carrying out activation by irradiation of a laser beam. SOLUTION: The transistor substrate for a liquid crystal display device is provided with an active layer 4 comprised of a polycrystalline silicone film formed on a substrate 2, a gate insulation film 6 formed on the active layer 4, a metal layer 8 composing the gate electrode formed on the gate insulation film 6, and an insulation film 10 formed on the metal layer 8 and preventing damage of the gate electrode. COPYRIGHT: (C)2009,JPO&INPIT