| 摘要 |
PURPOSE: A flow rate measuring device integrated with a valve is provided to miniaturize and simplify a structure by forming a valve and a flow rate sensor inside a housing. CONSTITUTION: A flow rate measuring device(100) integrated with a valve comprises a housing, and a sensor(112), a flow rate regulating valve(114), and a controller(106). A port is formed in the housing, so the fluid flows inside and outside. The sensor is installed inside the housing. The sensor measures the flow rate supplied from a fluid source to a processing unit. The flow rate regulating valve is installed inside the housing. The flow rate regulating valve adjusts the flow rate supplied to the processing unit according to the flow rate measured by the sensor. The controller is electrically connected to the sensor. The controller monitors the flow rate measured from the sensor. |
