LIGHT SOURCE BRIGHTNESS ADJUSTING SYSTEM AND METHOD FOR CRITICAL DIMENSION MEASURING DEVICE

摘要

A light source brightness adjusting system and method for a critical dimension measuring device. The light source brightness adjusting system comprises: a calibration marking unit (101), which is formed on a display panel by means of a photolithography technique and is provided with a plurality of marks; a mark pattern acquiring unit (102), which is configured to acquire patterns of the plurality of marks; a mark data collecting unit (103), which is configured to acquire actual line widths and line spaces of the plurality of marks based on the patterns of the plurality of marks, and calculate a ratio of the sum of an average value of the actual line widths and an average value of the actual line spaces to the sum of a predetermined line width and a predetermined line space; a mark data judging unit (104), which is configured to determine whether the ratio is within a predetermined range; and a light source brightness automatic adjusting unit (105), which is configured to generate a light source brightness adjusting signal to adjust a light source driving voltage if the mark data judging unit determines that the ratio is beyond the predetermined range. By appropriately adjusting the brightness of a light source, the accuracy of the measurement of a critical dimension is improved.