Methods for fabricating integrated circuits including generating e-beam patterns for directed self-assembly

摘要

Methods for fabricating integrated circuits are provided. In one example, a method for fabricating an integrated circuit includes generating an e-beam pattern for forming a DSA directing pattern on a semiconductor substrate. The DSA directing pattern is configured to guide a self-assembly material deposited thereon that undergoes directed self-assembly (DSA) to form a DSA pattern. Generating the e-beam pattern includes using a computing system, inputting a DSA target pattern. Using the computing system, the DSA target pattern, a DSA model, and an EBPC model, an output EBPCed pattern is produced for an e-beam writer to write on a resist layer that overlies the semiconductor substrate.

主权项

1. A method for fabricating an integrated circuit comprising:
generating an e-beam pattern for forming a DSA directing pattern on a semiconductor substrate, wherein the DSA directing pattern is configured to guide a self-assembly material deposited thereon that undergoes directed self-assembly (DSA) to form a DSA pattern, and wherein generating the e-beam pattern comprises:
using a computing system, inputting a DSA target pattern; andusing the computing system, the DSA target pattern, a DSA model, and an EBPC model to produce an output EBPCed pattern for an e-beam writer to write on a resist layer that overlies the semiconductor substrate.