| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of recovering grinding slurry, for efficiently discriminating used grinding slurry available for regeneration from grinding slurry having cleaning water mixed therein, and recovering the former and the latter separately from each other. SOLUTION: According to the method of recovering the semiconductor grinding slurry, the used grinding slurry stored in a slurry 3 storage section arranged in the lower portion of a storage tank 2 is measured with respect to conductivity or pH by a conductivity meter 4 or a pH meter. Then the semiconductor grinding slurry to be regenerated is discriminated from the semiconductor grinding slurry to be discarded, based on the resultant conductivity or the pH value, and the former and the latter are separated from each other by means of pneumatic valves 6a, 6b, thereby recovering the former into a semiconductor grinding slurry recovery tank 7 for regeneration, and the latter into a disposal tank 8 separately from each other. COPYRIGHT: (C)2008,JPO&INPIT
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