| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor and apparatus for distance measurement capable of accurately measuring distance. SOLUTION: Since the conductivity types of a photo-sensitive region and first and second semiconductor regions are not the same, the differences between a potentialϕ<SB>PG</SB>by an impurity ionized in the photo-sensitive region 1G and potentialsϕ<SB>FD1</SB>andϕ<SB>FD2</SB>by impurities ionized in the first and second semiconductor regions FD1 and FD2 are larger than the case when the conductivity types of the photo-sensitive region and the first and second semiconductor regions are the same. If the conductivity type of the photo-sensitive region 1G is the same p-type as those of semiconductor substrates 1A and 1A' with the potential differences present in this way and the concentration of the impurity is lowered, a potential distribution in a crosswise direction in the photo-sensitive region 1G is easily skewed only in one direction. Since carriers generated in the photo-sensitive region 1G easily and reliably flow in the first semiconductor regions FD1 and the second semiconductor regions FD2, it is possible to reduce the number of carriers remaining in the photo-sensitive region 1G. COPYRIGHT: (C)2009,JPO&INPIT |
