| 发明名称 |
MICRO-ELECTROMECHANICAL DEVICES AND METHODS OF FABRICATING THEREOF |
| 摘要 |
An electromechanical device includes a support structure formed by attaching inner surfaces of second and third substrates to a first substrate. The support structure includes at least one cavity between the second and third layers. An electromechanical active element is provided on an outer surface of at least one of the second or third layers.
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| 申请公布号 |
US2010019623(A1) |
申请公布日期 |
2010.01.28 |
| 申请号 |
US20090573161 |
申请日期 |
2009.10.05 |
| 申请人 |
AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH;SONY CORPORATION |
发明人 |
YAO KUI;TANG XIAO SONG ERIC;ZHANG JIAN;SHANNIGRAHI SANTIRANJAN;GAO PENG;HE XUJIANG |
| 分类号 |
H01L41/053;B81C3/00;H01L41/04;H01L41/09;H01L41/22;H03H3/02;H03H9/05 |
主分类号 |
H01L41/053 |
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