发明名称 METHOD AND SYSTEM FOR A SPIRAL MIXER
摘要 Included is a method and system of generating a diffused fluid using a spiral mixer comprising: injecting a first fluid into a first inlet port, generating a first fluid ribbon using a first narrow-gap slot; injecting a second fluid into a second inlet port and generating a second fluid ribbon; combining the first fluid and the second fluid ribbon into a spiraling flow around a cone feature in the mixing chamber of the first spiral mixing block, generating a combined flow of diffused fluids; dividing the combined flow in the mixing chamber of the first flow divider block, generating a divided flow of diffused fluids; combining the divided flow a mixing chamber of the final spiral mixing block, generating a final combined fluid flow in a spiraling flow around a final cone feature; and flowing the final combined fluid flow and dispensing the combined fluid flow onto a substrate.
申请公布号 US2016250606(A1) 申请公布日期 2016.09.01
申请号 US201514738128 申请日期 2015.06.12
申请人 Tokyo Electron Limited 发明人 Nasman Ronald
分类号 B01F5/04;B01F3/08;B01F15/02 主分类号 B01F5/04
代理机构 代理人
主权项 1. A system designed to combine and uniformly blend two or more fluids, the system comprising a spiral mixer, the spiral mixer comprising: a first injector configured to inject a first fluid into a first inlet port of an inlet block of the spiral mixer, generating a thin first fluid layer; a second injector configured to inject a second fluid into a second inlet port of the inlet block, generating a thin second fluid layer; a mixing module coupled to the first injector and the second injector and configured to receive the first fluid ribbon and the second fluid ribbon from the inlet block via a mixing chamber and perform a mixing process, wherein the mixing chamber comprises machined holes and mixing devices, the mixing module generating two mixed spiraling flows, the mixing module comprising: a first spiral mixing block coupled to the inlet block via first mixing chamber and configured to perform a first stage mixing of the first fluid ribbon and the second fluid ribbon in a smooth combined spiraling flow;a flow divider block coupled to the first spiral mixing block via a flow divider mixing chamber and configured to divide the combined spiraling flow into two mixed spiraling flows;a final spiral mixing block coupled to the flow divider block and configured to combine the two mixed spiraling flows into a combined mixed spiraling flows using a final mixing chamber and configured to refine a mixing uniformity of the combined mixed spiraling flows, generating a combined final spiraling flow; andan outlet block coupled to the final mixing block and configured to continue mixing of the first fluid and the second fluid in an outlet mixing chamber to achieve target mixing objectives;wherein two or more selected mixing variables of the mixing process are concurrently controlled and kept within acceptable ranges in order to achieve the target mixing objectives.
地址 Tokyo JP