| 摘要 |
An accumulation device is provided which can suppress the occurrence of wrinkles in the accumulated substrates by preventing substrates from floating off of the movable rollers during accumulation operation. This accumulation device (10) is provided with a first roller group which comprises multiple first rollers that can rotate, and a second roller group (58) which comprises multiple second rollers (56) that can rotate and that can move in the direction towards or away from the first roller group. Substrates (S) are conveyed alternately between the first rollers and the second rollers (56) so as to go back and forth in a wound state, and the substrates (S) are accumulated by relative movement of the first roller group and the second roller group (58) in the direction away from each other. The second rollers (56) are supported by a support member (62a) which is capable of moving relative to the first roller group, and are independently biased in the direction away from the first roller group by elastic members (87) which are provided on the support member (62a) corresponding to each of the second rollers (56). |
