| 发明名称 |
LASER DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM |
| 摘要 |
An example laser apparatus of the disclosure may include an oscillator capable of outputting a laser beam, a slab optical amplifier capable of amplifying the laser beam outputted by the oscillator by passing the laser beam through an optical amplification region shaped like a slab and outputting the amplified laser beam, and a mirror disposed on an optical path of the laser beam to enter the slab optical amplifier or the amplified laser beam outputted from the slab optical amplifier, the mirror being movable in a direction parallel to a plane where the laser beam travels in the slab optical amplifier. |
| 申请公布号 |
US2016316551(A1) |
申请公布日期 |
2016.10.27 |
| 申请号 |
US201615202781 |
申请日期 |
2016.07.06 |
| 申请人 |
GIGAPHOTON INC. |
发明人 |
KUROSAWA Yoshiaki |
| 分类号 |
H05G2/00;H01S3/10;H01S3/034;H01S3/23;H01S3/223 |
主分类号 |
H05G2/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A laser apparatus comprising:
an oscillator capable of outputting a laser beam; a slab optical amplifier capable of amplifying the laser beam outputted by the oscillator by passing the laser beam through an optical amplification region shaped like a slab and outputting the amplified laser beam; and a mirror disposed on an optical path of the laser beam to enter the slab optical amplifier or the amplified laser beam outputted from the slab optical amplifier, the mirror being movable in a direction parallel to a plane where the laser beam travels in the slab optical amplifier. |
| 地址 |
Tochigi JP |
