| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a locking mechanism for a stage apparatus capable of surely locking a stage plate, dispensing with a large driving force, and capable of controlling the rotation of the stage plate. <P>SOLUTION: The locking mechanism includes a pair of locking members 137 and 140 positioned between a pair of engaging members 90 and 91 arranged protrusively on the stage plates 60 and 61; a first linking member 110 which can reciprocatively move along a reference straight line SL; a pair of second linking members 151 and 152; a locking-time driving means CYC, 101, 170 and 172 for making the pair of locking members separate from each other and making the locking members engage with the corresponding engaging members; and an unlocking-time driving means for bringing the pair of locking members close to each other, and moving the locking members to an disengagement position where the locking members are separated from the corresponding engaging members. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
