| 摘要 |
PROBLEM TO BE SOLVED: To provide a piozoelectric thin film element containing a potassium sodium niobate thin film having excellent piezoelectric characteristics. SOLUTION: The piozoelectric thin film element includes: on a substrate 1; a lower electrode 2; a KNbO<SB>3</SB>thin film 3; a piezoelectric thin film 4 formed of potassium sodium niobate of perovskite structure (expressed by (K<SB>x</SB>Na<SB>1-x</SB>)NbO<SB>3</SB>(0<x<1)), which has a film thickness of 0.2μm to 10μm and a specific inductive capacity in the range of 50 or more and 200 or less; and an upper electrode 5. COPYRIGHT: (C)2009,JPO&INPIT
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