FINFET WITH CONSTRAINED SOURCE-DRAIN EPITAXIAL REGION

摘要

A method includes forming a plurality of fins on a substrate, a gate is formed over a first portion of the plurality of fins with a second portion of the plurality of fins remaining exposed. Spacers are formed on opposite sidewalls of the second portion of the plurality of fins. The second portion of the plurality fins is removed to form a trench between the spacers. An epitaxial layer is formed in the trench. The spacers on opposite sides of the epitaxial layer constrain lateral growth of the epitaxial layer.

主权项

1. A semiconductor structure comprising:
a plurality of fins on a substrate; a gate over a first portion of the plurality of fins, a second portion of the plurality of fins is exposed; and a nitride material above and in direct contact with the gate and on opposite sides of the second portion of the plurality of fins such that a top region of the second portion of the plurality of fins remains exposed, the nitride material on opposite sides of the second portion of the plurality of fins comprises sidewall spacers, wherein the second portion of the plurality of fins comprises:
an epitaxially grown semiconductor material, wherein lateral growth of the epitaxially grown semiconductor material is prevented by the sidewall spacers, the epitaxially grown semiconductor material comprises geometrically constrained unmerged source-drain regions,wherein a top portion of the epitaxially grown semiconductor material extends upwardly from the sidewall spacers,wherein epitaxial growth of the top portion of the epitaxially grown semiconductor material takes place on a [111] plane, andwherein a width of the top portion of the epitaxially grown semiconductor material is equal to or less than a width of the geometrically constrained unmerged source-drain regions.