| 发明名称 |
DISPLACEMENT MEASUREMENT OF DEFORMABLE BODIES |
| 摘要 |
A method for measuring a position of an object, the method includes probing a sensing mark arranged in a first plane on a substrate to determine the position of the object, a portion of the substrate connecting the sensing mark to the object. An edge of the object can be sufficiently close to an edge of the sensing mark to reduce measurement errors in the position of the object caused by a deformation of the substrate. |
| 申请公布号 |
US2016363439(A1) |
申请公布日期 |
2016.12.15 |
| 申请号 |
US201615147090 |
申请日期 |
2016.05.05 |
| 申请人 |
Zygo Corporation |
发明人 |
Badami Vivek G. |
| 分类号 |
G01B11/16;G03F7/20;G01B11/14 |
主分类号 |
G01B11/16 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for measuring a position of an object, the method comprising:
probing a sensing mark arranged in a first plane on a substrate to determine the position of the object, a portion of the substrate connecting the sensing mark to the object; wherein an edge of the object is sufficiently close to an edge of the sensing mark to reduce measurement errors in the position of the object caused by a deformation of the substrate. |
| 地址 |
Middlefield CT US |
