发明名称 半導体装置の製造方法
摘要 To suppress the reduction in reliability of a resin-sealed semiconductor device. A first cap (member) and a second cap (member) with a cavity (space formation portion) are superimposed and bonded together to form a sealed space. A semiconductor including a sensor chip (semiconductor chip) and wires inside the space is manufactured in the following way. In a sealing step of sealing a joint part between the caps, a sealing member is formed of resin such that an entirety of an upper surface of the second cap and an entirety of a lower surface of the first cap are respectively exposed. Thus, in the sealing step, the pressure acting in the direction of crushing the second cap can be decreased.
申请公布号 JP5732286(B2) 申请公布日期 2015.06.10
申请号 JP20110057832 申请日期 2011.03.16
申请人 ルネサスエレクトロニクス株式会社 发明人 高橋 典之
分类号 H01L23/10;B81B3/00;B81C3/00;H01L23/04;H01L23/08;H01L29/84 主分类号 H01L23/10
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