发明名称 REMOVER SOLUTION
摘要 A cleaning (stripping) solution comprises a mixture of a first compound, a second compound and water. The cleaning solution can effectively remove metal oxides without damaging the surface of the metal materials. The cleaning solution can successfully remove both organic and inorganic residues.
申请公布号 EP1544324(A1) 申请公布日期 2005.06.22
申请号 EP20020760056 申请日期 2002.08.19
申请人 MERK-KANTO ADVANCED CHEMICAL LTD. 发明人 LI, YING-HAO;LU, CHIH-PENG
分类号 C11D3/20;C11D3/34;C11D7/26;C11D7/34;C11D11/00;C23G1/06;C23G1/10;G03F7/42;H01L21/311;H01L21/3213;(IPC1-7):C23G1/06 主分类号 C11D3/20
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