发明名称 |
REMOVER SOLUTION |
摘要 |
A cleaning (stripping) solution comprises a mixture of a first compound, a second compound and water. The cleaning solution can effectively remove metal oxides without damaging the surface of the metal materials. The cleaning solution can successfully remove both organic and inorganic residues.
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申请公布号 |
EP1544324(A1) |
申请公布日期 |
2005.06.22 |
申请号 |
EP20020760056 |
申请日期 |
2002.08.19 |
申请人 |
MERK-KANTO ADVANCED CHEMICAL LTD. |
发明人 |
LI, YING-HAO;LU, CHIH-PENG |
分类号 |
C11D3/20;C11D3/34;C11D7/26;C11D7/34;C11D11/00;C23G1/06;C23G1/10;G03F7/42;H01L21/311;H01L21/3213;(IPC1-7):C23G1/06 |
主分类号 |
C11D3/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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