发明名称 |
Ethylene terephthalate polymer retaining ring for a chemical mechanical polishing head |
摘要 |
Embodiments of a retaining ring for use with a chemical mechanical polishing process with a body including a polyethylene terephthalate polymer or polymer including ethylene terephthalate monomers are disclosed.
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申请公布号 |
US2008051011(A1) |
申请公布日期 |
2008.02.28 |
申请号 |
US20060542303 |
申请日期 |
2006.10.02 |
申请人 |
MOLONEY GERARD STEPHEN;LAO PETER |
发明人 |
MOLONEY GERARD STEPHEN;LAO PETER |
分类号 |
B24B7/30;B24B29/00 |
主分类号 |
B24B7/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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