| 摘要 |
PROBLEM TO BE SOLVED: To provide microballs of active metal having uniform size and its manufacturing method and further to provide the microballs stable in the air by covering the surface thereof with passivation film. SOLUTION: Active metal is filled into a crucible 10 and a microball recovery bowl 19 is inserted on the underside of an orifice 17, and a gate valve 20 is closed. After an inside of the crucible 10, a space into which the recovery bowl 19 is inserted and a microball discharge chamber 22 are evacuated, inert gas is introduced. Subsequently, the active metal is melted by heating using a heating device 13, and then a piezoelectric pulse is applied to a piezoelectric actuator 11 to jet the molten active metal through the orifice 17. The jetted molten metal is formed into a microball having a size nearly the same as the bore diameter of the orifice 17 and recovered in the recovery bowl 19. COPYRIGHT: (C)2008,JPO&INPIT
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