| 摘要 |
PROBLEM TO BE SOLVED: To detect a failure where logical value variation is caused by dynamic interference of signal variation in adjacent signal lines of a circuit to be inspected, more accurately than a conventional technology. SOLUTION: This failure inspection apparatus inspects a failure of each signal line of the circuit to be inspected including a plurality of signal lines. The failure inspection apparatus calculates the value of a failure excitation function related to the failure signal line using the failure excitation function showing an adaptation result of a predetermined failure exciting condition between the failure signal line and each adjacent signal line based on the layout information, manufacturing parameter information, and timing information between the failure signal line for assuming a failure in the signal line to be inspected of the circuit to be inspected and at least one adjacent signal line within a predetermined range from the failure signal line. The failure inspection apparatus determines whether or not a dynamic failure is excited in the failure signal line based on the calculated failure excitation function. COPYRIGHT: (C)2009,JPO&INPIT
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