| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a micropump for supplying a gas flow to a sensor prevents downsizing and simplification of the sensor. SOLUTION: The gas rate sensor utilizes the magnetic wind phenomenon as a gas flow generating means. When a magnetic field is applied to a paramagnetic gas, the gas is drawn toward the magnetic field. If the gas is heated, the paramagnetism is lost resulting in generating a flow toward a weaker magnetic field. With the use of a gas flow generated by the magnetic wind phenomenon, the gas rate sensor detects, with a heat wire, the deflection of gas flow which occurs when an angular velocity is applied to the gas flow. COPYRIGHT: (C)2009,JPO&INPIT |
