CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FABRICATING THE SAME

摘要

Disclosed are a capacitive micromachined ultrasonic transducer and a manufacturing method thereof. The disclosed ultrasonic transducer includes a device substrate which includes a first trench which limits a plurality of first parts which are insulated from each other and correspond to a plurality of elements and a second trench which limits a second part which is separated from the first parts, a support stand which limits a plurality of cavities corresponding to each element on the device substrate, a membrane which covers the cavities on the support stand, and a top electrode which is electrically connected to the second part in the second trench through a via hole which passes through the membrane and the support stand on the membrane.