METHOD AND SYSTEM FOR SCRIBING HEAT PROCESSED TRANSPARENT MATERIALS

摘要

A method of laser processing a heat processed transparent material is disclosed wherein the heat processed transparent material includes a top compressive layer, a bottom compressive layer, and a tensile layer between the top compressive layer and the bottom compressive layer. A laser beam includes a burst of laser pulses or a single laser pulse which is externally focussed relative to the heat processed transparent material to form a beam waist at a first location external to the heat processed transparent material avoiding formation of a plasma channel external to the heat processed transparent material. The laser pulses or pulse are focused such that a sufficient energy density is maintained within the bottom compressive layer of the heat processed transparent material to form continuous laser filaments in the top and bottom compressive layers therein without causing optical breakdown. The laser filaments do not extend into the tensile layer.

主权项

1. A method of laser processing a heat processed transparent material, said heat processed transparent material includes a top compressive layer, a bottom compressive layer, and a tensile layer between said top compressive layer and said bottom compressive layer, comprising the steps of:
providing a laser beam, said laser beam includes a burst of ultrafast laser pulses or a single ultrafast laser pulse; externally focusing said laser beam relative to said heat processed transparent material to form a beam waist at a first location external to said heat processed transparent material; said laser pulses or pulse are focused such that a sufficient energy density is maintained within said bottom compressive layer of said heat processed transparent material to form a first continuous laser filament in said bottom compressive layer therein without causing optical breakdown; said first filament is located in said bottom compressive layer and extends to an external surface of said bottom compressive layer, said first filament starting below said tensile layer; externally focusing said laser beam relative to said heat processed transparent material to form a beam waist at a second location external to said heat processed transparent material; said laser pulses or pulse are focused such that a sufficient energy density is maintained within said top compressive layer of said heat processed transparent material to form a second continuous laser filament in said top compressive layer therein without causing optical breakdown; said second filament is located in said top compressive layer and extends to an external surface of said top compressive layer, said second filament starting above said tensile layer; and, means for varying the relative position between said laser beam and said heat processed transparent material.