PROCESS FOR REMOVING RESIDUES FROM A SEMICONDUCTOR SUBSTRATE,申请号EP19980944639-传众专利搜索

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发明名称	PROCESS FOR REMOVING RESIDUES FROM A SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	EP1024965(B1)	申请公布日期	2006.06.14
申请号	EP19980944639	申请日期	1998.09.01
申请人	ARCH SPECIALTY CHEMICALS, INC.	发明人	LOVE, M., LEE, JR.;HONDA, KENJI
分类号	B44C1/22;C11D3/00;C11D3/20;C11D3/33;C11D7/10;C11D7/26;C11D7/32;C11D11/00;G03F7/42;H01L21/00;H01L21/02;H01L21/304;H01L21/306;H01L21/3213	主分类号	B44C1/22
代理机构		代理人
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